<\/figcaption><\/figure>\n\u4e8b\u5b9e\u4e0a\uff0c\u97e9\u56fd\u65e9\u57282000\u5e74\u5c31\u5f00\u59cb\u5e03\u5c40\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u4ea7\u4e1a\u3002\u8fd1\u5e74\u6765\u4e0d\u65ad\u52a0\u5927\u529b\u5ea6\uff0c\u9891\u9891\u53d1\u529b\u3002\u653f\u7b56\u5229\u597d\uff0c\u4f01\u4e1a\u6269\u4ea7\u6536\u8d2d\u4e0d\u65ad\u3002<\/p>\n
2000\u5e74\u97e9\u56fd\u5236\u8ba2\u4e86GaN\u5f00\u53d1\u8ba1\u5212\uff0c\u653f\u5e9c\u57282004~2008\u5e74\u6295\u51654.72\u4ebf\u7f8e\u5143\uff0c\u4f01\u4e1a\u6295\u51657.36\u4ebf\u7f8e\u5143\u4ee5\u652f\u6301\u97e9\u56fd\u8fdb\u884c\u5149\u7535\u5b50\u4ea7\u4e1a\u53d1\u5c55\uff0c\u4f7f\u97e9\u56fd\u6210\u4e3a\u4e9a\u6d32\u6700\u5927\u7684\u5149\u7535\u5b50\u5668\u4ef6\u751f\u4ea7\u56fd\u3002<\/p>\n
2009\u5e74\u97e9\u56fd\u53d1\u5e03\u300a\u7eff\u8272\u6210\u957f\u56fd\u5bb6\u6218\u7565\u300b\uff0c\u5168\u529b\u53d1\u5c55\u73af\u4fdd\u8282\u80fd\u4ea7\u4e1a\uff0c\u5e76\u81f4\u529b\u4e8e\u4f7f\u5f97\u8be5\u4ea7\u4e1a\u6210\u4e3a\u97e9\u56fd\u7ecf\u6d4e\u589e\u957f\u7684\u4e3b\u8981\u52a8\u529b\u4e4b\u4e00\u3002<\/p>\n
2010\u20142012\u5e74\u95f4\u6295\u5165\u7ea64500\u4e07\u7f8e\u91d1\u4ee5\u63a8\u52a8MOCVD\u673a\u53f0\u5b9e\u73b0\u56fd\u4ea7\u5316\u3001\u5f15\u8fdb\u5236\u7a0b\u81ea\u52a8\u5316\u7cfb\u7edf\u5e76\u5f00\u53d1\u9ad8\u901f\u5c01\u88c5\u3001\u76d1\u6d4b\u8bbe\u5907\u3002<\/p>\n
2016\u5e74\uff0c\u97e9\u56fd\u56f4\u7ed5Si\u57faGaN\u548cSiC\u5668\u4ef6\u542f\u52a8\u529f\u7387\u7535\u5b50\u56fd\u5bb6\u9879\u76ee\uff0c\u540c\u65f6\u91cd\u70b9\u56f4\u7ed5\u9ad8\u7eafSiC\u7c89\u672b\u5236\u5907\u3001\u9ad8\u7eafSiC\u591a\u6676\u9676\u74f7\u3001\u9ad8\u8d28\u91cfSiC\u5355\u6676\u751f\u957f\u3001\u9ad8\u8d28\u91cfSiC\u5916\u5ef6\u6750\u6599\u751f\u957f4\u4e2a\u65b9\u5411\uff0c\u5f00\u5c55\u4e86\u56fd\u5bb6\u7814\u53d1\u9879\u76ee\u3002<\/p>\n
2017\u5e74\uff0c\u97e9\u56fd\u4ea7\u4e1a\u901a\u5546\u8d44\u6e90\u90e8\uff08MOTIE\uff09\u4e3e\u529e\u7814\u8ba8\u4f1a\uff0c\u4e3a\u4e86\u5f3a\u5316\u7cfb\u7edf\u534a\u5bfc\u4f53\u7684\u7ade\u4e89\u529b\uff0c\u4ea7\u3001\u5b98\u3001\u5b66\u4e09\u754c\u8054\u624b\u6295\u8d444645\u4ebf\u97e9\u5143\uff084.15\u4ebf\u7f8e\u5143\uff09\uff0c\u5f00\u53d1\u4f4e\u80fd\u6e90\u3001\u8d85\u8f7b\u91cf\u548c\u8d85\u9ad8\u901f\u7684\u534a\u5bfc\u4f53\u82af\u7247\u3002<\/p>\n
\u8fd9\u5f53\u4e2d1326\u4ebf\u97e9\u5143\u7528\u4e8e\u5f00\u53d1\u5148\u8fdb\u8d85\u8f7b\u91cf\u4f20\u611f\u5668\u3001837\u4ebf\u97e9\u5143\u6295\u5165\u4f4e\u8017\u80fd\u7684SiC\u529f\u7387\u534a\u5bfc\u4f53\uff0c47\u4ebf\u97e9\u5143\u6295\u8d44\u8d85\u9ad8\u901f\u5b58\u50a8\u5668\u548c\u7cfb\u7edf\u6574\u5408\u8bbe\u8ba1\u6280\u672f\u3002<\/p>\n
2021\u5e74\uff0c\u97e9\u56fd\u653f\u5e9c\u5bf9\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u7684\u53d1\u5c55\u8d8a\u6765\u8d8a\u91cd\u89c6\u3002\u97e9\u56fd\u653f\u5e9c\u53d1\u5e03\u4e86\u4e00\u4efd\u5148\u8fdb\u529f\u7387\u534a\u5bfc\u4f53\u7814\u53d1\u548c\u4ea7\u80fd\u63d0\u5347\u8ba1\u5212\uff0c\u8ba1\u5212\u52302025\u5e74\u5c06\u5e02\u573a\u7ade\u4e89\u529b\u63d0\u5347\u5230\u5168\u7403\u6c34\u5e73\uff0c\u4ee5\u4fbf\u5230\u90a3\u4e00\u5e74\u97e9\u56fd\u81f3\u5c11\u67095\u79cd\u5148\u8fdb\u7684\u529f\u7387\u534a\u5bfc\u4f53\u4ea7\u54c1\u4e0a\u5e02\u3002<\/p>\n
\u540c\u65f6\uff0c\u97e9\u56fd\u5ba3\u5e03\u542f\u52a8\u201cX-band GaN\u534a\u5bfc\u4f53\u96c6\u6210\u7535\u8def\u201d\u56fd\u4ea7\u5316\u8bfe\u9898\u3002\u97e9\u56fd\u65e0\u7ebf\u901a\u4fe1\u8bbe\u5907\u534a\u5bfc\u4f53\u4f01\u4e1aRFHIC\uff08\u827e\u5c14\u798f\uff09\u88ab\u9009\u5b9a\u4e3a\u8bfe\u9898\u7275\u5934\u4f01\u4e1a\uff0cSK Siltron\u5c06\u53c2\u4e0eSiC\u57fa\u677f\/GaN\u6811\u8102\u7684\u5236\u4f5c\uff0cLIG nex1\u8d1f\u8d23\u7cfb\u7edf\u7684\u9a8c\u8bc1\uff0c\u97e9\u56fd\u7535\u5b50\u901a\u4fe1\u7814\u7a76\u9662(ETRI)\u7684\u534a\u5bfc\u4f53\u5de5\u5382\u5c06\u88ab\u7528\u6765\u8fdb\u884cGaN MMIC\u7684\u5236\u4f5c\u3002<\/p>\n
2022\u5e74\uff0c\u97e9\u56fd\u63a8\u51fa\u5176\u7531\u56fd\u5185\u534a\u5bfc\u4f53\u4f01\u4e1a\u3001\u5927\u5b66\u3001\u7814\u7a76\u6240\u7b49\u7ec4\u6210\u7684\u201c\u65b0\u4e00\u4ee3\u6676\u4f53\u5de5\u7a0b\u90e8\u201d\u3002\u4ee5\u5f00\u53d1\u65b0\u4e00\u4ee3\u529f\u7387\u534a\u5bfc\u4f53\uff0c\u5e94\u5bf9\u78b3\u5316\u7845 (SiC)\u3001\u6c2e\u5316\u9553 (GaN) \u548c\u6c27\u5316\u9553 (Ga203) \u7b49\u5feb\u901f\u589e\u957f\u7684\u5168\u7403\u529f\u7387\u534a\u5bfc\u4f53\u5e02\u573a\u3002<\/p>\n
\u5176\u4e2d\uff0cLX Semicon\u3001SK siltron\u3001Hana Materials\u3001STI\u7b4930\u5bb6\u529f\u7387\u534a\u5bfc\u4f53\u516c\u53f8\u5c06\u53c2\u4e0e\u6750\u6599\u3001\u96f6\u4ef6\u3001\u8bbe\u5907\u7684\u529f\u7387\u534a\u5bfc\u4f53\u5f00\u53d1\u3002<\/p>\n
LX Semicon\u5c06\u5f00\u53d1SiC\u534a\u5bfc\u4f53\uff0cSK siltron\u5c06\u8d1f\u8d23SiC\u886c\u5e95\u3002Hana Materials\u548cSTI\u5c06\u5f00\u53d1SiC\u534a\u5bfc\u4f53\u96f6\u4ef6\u548c\u8bbe\u5907\u6280\u672f\u3002\u5149\u4e91\u5927\u5b66\u3001\u5609\u6cc9\u5927\u5b66\u548c\u56fd\u6c11\u5927\u5b66\u5c06\u652f\u6301SiC\u534a\u5bfc\u4f53\u7814\u53d1\u57fa\u7840\u8bbe\u65bd\uff0c\u56fd\u7acb\u7eb3\u7c73\u6750\u6599\u7814\u7a76\u6240\u548c\u97e9\u56fd\u9676\u74f7\u5de5\u7a0b\u6280\u672f\u7814\u7a76\u6240\u5c06\u63d0\u4f9b\u6280\u672f\u652f\u6301\u3002<\/p>\n
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