\u6c2e\u5316\u9553\u886c\u5e95\u5382\u5546\uff0c\u52a8\u6001\u9891\u9891<\/strong><\/p>\n\u6c2e\u5316\u9553\u6574\u4e2a\u4ea7\u4e1a\u94fe\u53ef\u7ec6\u5206\u4e3a\u886c\u5e95\u3001\u5916\u5ef6\u3001\u6676\u5706\u4ee3\u5de5\u3001\u82af\u7247\u8bbe\u8ba1\u56db\u4e2a\u73af\u8282\uff0c\u800c\u886c\u5e95\uff08Substrate\uff09\u662f\u4ea7\u4e1a\u94fe\u7684\u6e90\u5934\u3002\u4ece\u5236\u5907\u96be\u5ea6\u4e0a\u770b\uff0c\u4e0d\u540c\u4e8eSi\u548cSiC\u82af\u7247\uff0cGaN\u7684\u5916\u5ef6\u7247\u901a\u5e38\u7528\u7684\u662f\u5f02\u8d28\u886c\u5e95\uff0c\u84dd\u5b9d\u77f3\u3001\u78b3\u5316\u7845\u3001\u7845\u7b49\u662f\u6c2e\u5316\u9553\u5916\u5ef6\u7247\u4e3b\u6d41\u7684\u5f02\u8d28\u886c\u5e95\u6750\u6599\u3002\u76f8\u5bf9\u4e8e\u5e38\u89c4\u534a\u5bfc\u4f53\u6750\u6599\uff0cGaN\u5355\u6676\u7684\u751f\u957f\u8fdb\u5c55\u7f13\u6162\uff0c\u6676\u4f53\u5c3a\u5bf8\u5c0f\u4e14\u6210\u672c\u9ad8\uff0c\u5f53\u524d\u7684GaN\u57fa\u5668\u4ef6\u4e3b\u8981\u57fa\u4e8e\u5f02\u8d28\u886c\u5e95\u5236\u4f5c\u800c\u6210\uff0c\u4f7f\u5f97GaN\u5355\u6676\u886c\u5e95\u53ca\u540c\u8d28\u5916\u5ef6\u5668\u4ef6\u7684\u53d1\u5c55\u843d\u540e\u4e8e\u57fa\u4e8e\u5f02\u8d28\u5916\u5ef6\u5668\u4ef6\u7684\u5e94\u7528\u3002<\/p>\n
\u76ee\u524d\uff0cGaN\u5916\u5ef6\u6280\u672f\u5e38\u7528\u7684\u4e3b\u8981\u662fHPVE\uff08\u6c22\u5316\u7269\u5316\u5b66\u6c14\u76f8\u5916\u5ef6\uff09\u3001\u6c28\u70ed\u6cd5\uff08Ammonothermal\uff09\u3001 \u52a9\u7194\u5242\u6cd5\/\u94a0\u6d41\u6cd5\uff08Na Flux Method\uff09\u4e09\u79cd\uff0c\u8fd8\u6709\u4e00\u4e9b\u5382\u5546\u91c7\u7528PVD\uff08\u7269\u7406\u6c14\u76f8\u4f20\u8f93\u6cd5\uff09\u3001MOCVD\uff08\u91d1\u5c5e\u6709\u673a\u7269\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff09\u3001MBE\uff08\u5206\u5b50\u675f\u5916\u5ef6\uff09\u3001CVD\uff08\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff09\u7b49\u65b9\u6cd5\u3002<\/p>\n
\u4ece\u5e02\u573a\u683c\u5c40\u4e0a\u770b\uff0c\u56fd\u5916\u886c\u5e95\u5382\u5546\u4e3b\u8981\u6709\u65e5\u672c\u4f4f\u53cb\u5316\u5b66\uff08SCIOCS\uff09\u3001\u65e5\u672c\u788d\u5b50\uff08NGK\uff09\u3001\u65e5\u672c\u4e09\u83f1\uff08Mitsubishi\uff09\u3001\u65e5\u672c\u53e4\u6cb3\u7535\u6c14\uff08Furukawa\uff09\u3001\u6ce2\u5170Ammono\u3001\u7f8e\u56fdKymatech\u3002\u56fd\u5185\u886c\u5e95\u5382\u5546\u4e3b\u8981\u662f\u82cf\u5dde\u7eb3\u7ef4 (Nanowin)\u3001\u4e1c\u839e\u4e2d\u9553( Sino Nitride)\u3002<\/p>\n
\u4eca\u5e74\u6765\uff0c\u6c2e\u5316\u9553\u886c\u5e95\u7814\u53d1\u6709\u4e86\u65b0\u52a8\u6001\u3002\u4eca\u5e741\u6708\uff0c\u636e\u65e5\u5a92\u62a5\u9053\uff0c\u4f4f\u53cb\u5316\u5b66\u5df2\u7ecf\u6210\u529f\u5efa\u7acb4\u82f1\u5bf8\u6c2e\u5316\u9553\u886c\u5e95\u7684\u91cf\u4ea7\u6280\u672f\uff0c\u5c06\u4ece2024\u5e74\u5f00\u59cb\u4e0e\u5ba2\u6237\u534f\u8c03\u91cf\u4ea7\u4e8b\u5b9c\uff0c\u8fd8\u5c06\u63d0\u4f9bGaN on GaN\u5782\u76f4\u578b\u5916\u5ef6\u4ea7\u54c1\u3002<\/p>\n
\u636e\u6089\uff0c\u961c\u9633\u5e08\u8303\u5927\u5b66\u79d1\u7814\u5904\u4e8e3\u67081\u65e5\u5230\u8bbf\u9553\u6570\u6c2e\u5316\u7269\u4ea7\u4e1a\u7814\u7a76\u9662\uff0c\u5c31\u201c4\u82f1\u5bf8\u6c2e\u5316\u9553\u5355\u6676\u886c\u5e95\u5236\u5907\u5173\u952e\u6280\u672f\u201d\u9879\u76ee\u5c55\u5f00\u8c03\u7814\u3002\u8be5GaN\u9879\u76ee\u4e3a\u961c\u9633\u5e02\u6821\u5408\u4f5c\u4ea7\u4e1a\u6280\u672f\u7814\u7a76\u9662\u9879\u76ee\uff0c\u76ee\u524d\u9553\u6570\u4e2d\u8bd5\u7ebf\u80fd\u591f\u987a\u5229\u751f\u4ea74\u82f1\u5bf8\u6c2e\u5316\u9553\u5355\u6676\u886c\u5e95\uff0c6\u82f1\u5bf8\u548c\u66f4\u5927\u5c3a\u5bf8\u7684\u6c2e\u5316\u9553\u5355\u6676\u5c1a\u5728\u6280\u672f\u653b\u575a\u8fc7\u7a0b\u4e2d\u3002<\/p>\n
\u8d44\u6599\u663e\u793a\uff0c\u9553\u6570\u6c2e\u5316\u7269\u4ea7\u4e1a\u7814\u7a76\u9662\u6210\u7acb\u4e8e2022\u5e74\uff0c\u7ecf\u8425\u8303\u56f4\u5305\u62ec\u65b0\u6750\u6599\u6280\u672f\u7814\u53d1\u3001\u534a\u5bfc\u4f53\u5206\u7acb\u5668\u4ef6\u5236\u9020\u7b49\u3002<\/p>\n
3\u67088\u65e5\uff0c\u636e\u65e5\u5a92\u62a5\u9053\uff0c\u65e5\u672c\u5927\u962a\u5927\u5b66\uff08Osaka University\uff09\u3001\u4e30\u7530\u5408\u6210\u548c\u677e\u4e0b\u63a7\u80a1\u516c\u53f8\u677e\u4e0b\u9ad8\u6e05\u4e09\u65b9\u5408\u4f5c\u7684GaN\u886c\u5e95\u5f00\u53d1\u9879\u76ee\u53d6\u5f97\u4e86\u65b0\u8fdb\u5c55\uff0c\u5df2\u6210\u529f\u5236\u5907\u9ad8\u8d28\u91cf6\u82f1\u5bf8GaN\u886c\u5e95\u3002\u4e30\u7530\u5408\u6210\u501f\u52a9\u4e86\u5927\u962a\u5927\u5b66\u65b0\u5f00\u53d1\u7684\u6280\u672f\u6210\u529f\u5236\u5907\u7f3a\u9677\u5bc6\u5ea6\u4e3a104\/ cm2\u76846\u82f1\u5bf8GaN\u886c\u5e95\uff0c\u8be5\u6280\u672f\u7ed3\u5408\u4e86Na\u52a9\u710a\u5242\u6cd5\u548c\u591a\u70b9\u6676\u79cd\u6cd5\uff0c\u517c\u5177\u9ad8\u8d28\u91cf\u53ca\u6613\u6269\u5f84\u7684\u4f18\u70b9\u3002\u6b64\u5916\uff0c\u4ee5\u8be5\u6280\u672f\u4e3a\u57fa\u7840\uff0c\u4ed6\u4eec\u5c06\u5f00\u53d1\u517c\u5bb98\u82f1\u5bf8\u6216\u66f4\u5927\u5c3a\u5bf8\u7684\u6676\u4f53\u751f\u957f\u8bbe\u5907\uff0c\u7528\u4e8e\u672a\u6765\u8fdb\u4e00\u6b65\u5f00\u53d1\u5927\u5c3a\u5bf8\u886c\u5e95\u3002<\/p>\n
\u6c2e\u5316\u9553\uff1a\u7b2c\u4e8c\u6b21\u7535\u529b\u7535\u5b50\u5b66\u9769\u547d\u50ac\u5316\u5242<\/strong><\/p>\n\u4ece\u539f\u7406\u4e0a\u770b\uff0c\u6c2e\u5316\u9553\u662f\u7531\u9553\uff08\u539f\u5b50\u5e8f\u657031\uff09\u548c\u6c2e\uff08\u539f\u5b50\u5e8f\u65707\uff09\u7ed3\u5408\u800c\u6765\u7684\u5316\u5408\u7269\uff0c\u662f\u62e5\u6709\u7a33\u5b9a\u516d\u8fb9\u5f62\u6676\u4f53\u7ed3\u6784\u7684\u5bbd\u7981\u5e26\u534a\u5bfc\u4f53\u6750\u6599\u3002\u8fd9\u91cc\u7684\u7981\u5e26\uff0c\u662f\u6307\u7535\u5b50\u4ece\u539f\u5b50\u6838\u8f68\u9053\u4e0a\u8131\u79bb\u6240\u9700\u8981\u7684\u80fd\u91cf\u3002\u800c\u6c2e\u5316\u9553\u7684\u7981\u5e26\u5bbd\u5ea6\u4e3a3.4eV\uff0c\u662f\u7845\u76843\u500d\u591a\uff0c\u6545\u6c2e\u5316\u9553\u62e5\u6709\u5bbd\u7981\u5e26\u7279\u6027\uff08WBG\uff09\u3002<\/p>\n